Fast three-dimensional laser micromachining of silicon for microsystems

Sensors and Actuators, A: Physical

Volumn 52, Issue 1-3, 1996, Pages 121-125

  Müllenborn, Matthias ^a   Dirac, Holger ^a   Petersen, Jon Wulff ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

Laser direct etching; Rapid prototyping; Silicon micromachining; Three dimensional microstructures

Indexed keywords

ETCHING; LASER APPLICATIONS; MICROMACHINING; MICROSTRUCTURE; RAPID PROTOTYPING; SILICON; SUBSTRATES;

LASER DIRECT ETCHING; MICROSYSTEMS; SILICON MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030100427     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80136-1     Document Type: Article

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