Single-pulse ultraviolet laser-induced surface modification and ablation of polyimide

Applied Physics Letters

Volumn 73, Issue 6, 1998, Pages 847-849

  Piglmayer, K ^a   Arenholz, E ^a   Ortwein, C ^a   Arnold, N ^a   Bauerle D ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002822279     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122021     Document Type: Article

References (18)

1. D. Bäuerle, Laser Processing and Chemistry (Springer, Heidelberg, 1996).
2. R. Srinivasan, in Laser Ablation, edited by, J. C. Miller, Springer Ser. Mater. Sci., Vol. 28 (Springer, Berlin, 1994), p. 107.
3. M. Himmelbauer, Ph.D. dissertation, Linz, 1996.
4. M. Himmelbauer, E. Arenholz, and D. Bäuerle, Appl. Phys. A: Mater. Sci. Process. 63A, 87 (1996).
5. S. Küper, J. Brannon, and K. Brannon, Appl. Phys. A: Solids Surf. A56, 43 (1993).
6. M. Himmelbauer, E. Arenholz, D. Bäuerle, and K. Schilcher, Appl. Phys. A: Mater. Sci. Process. 63A, 337 (1996).
7. J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, Appl. Phys. Lett. 43, 717 (1983).
8. J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns, and J. Kaufman, J. Appl. Phys. 58, 2036 (1985).
9. P. E. Dyer and J. Sidhu, J. Appl. Phys. 57, 1420 (1985).
10. Du Pont, Inc., Kapton Polyimide Film-Summary of Properties (1988).
11. D. Bäuerle, B. Luk'yanchuk, P. Schwab, X. Z. Wang, and E. Arenholz, in Laser Ablation of Electronic Materials, edited by E. Fogarassy and S. Lazare (Elsevier, Amsterdam, 1992), p. 39.
12. B. Luk'yanchuk, N. Bityurin, M. Himmelbauer, and N. Arnold, Nucl. Instrum. Methods Phys. Res. B 122, 347 (1997).
13. N. Arnold, B. Luk'yanchuk, and N. Bityurin, Appl. Surf. Sci. 127, 184 (1998).
14. L. D. Landau and E. M. Lifshitz, Course of Theoretical Physics, Vol. 5, Statistical Physics, Part 1 (Pergamon, Oxford, 1980).
15. E. I. Sobol, Phase Transformations and Ablation in Laser-Treated Solids (Wiley, New York, 1995).
16. R. Srinivasan, R. R. Hall, W. D. Loehle, W. D. Wilson, and D. C. Allbee, J. Appl. Phys. 78, 4881 (1995).
17. Z. Ball, T. Feurer, D. L. Callahan, and R. Sauerbrey, Appl. Phys. A: Mater. Sci. Process. 62A, 203 (1996).
18. S. Lazare, W. Guan, and D. Drilhole, Appl. Surf. Sci. 96-98, 605 (1996).