Sub-micron grating formation in Ta 2 O 5 -waveguides by femtosecond UV-laser ablation

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 107-110

  Beinhorn, F ^a   Ihlemann, J ^a   Simon, P ^a   Marowsky, G ^a   Maisenholder B ^b   Edlinger, J ^b   Neuschafer D ^c   Anselmetti, D ^c  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b Thin Film Products AG   (Liechtenstein)

^c NOVARTIS PHARMA AG   (Switzerland)

Author keywords

Femtosecond laser; Grating; Laser ablation; Micro patterning

Indexed keywords

EID: 0000889928     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00390-0     Document Type: Article

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