3D integration of microcomponents in a single glass chip by femtosecond laser direct writing for biochemical analysis

Applied Surface Science

Volumn 253, Issue 15, 2007, Pages 6595-6598

  Sugioka, Koji ^a   Hanada, Yasutaka ^a   Midorikawa, Katsumi ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

3D microfabrication; Biochemical analysis; Femtosecond laser; Laser direct writing; Microchip

Indexed keywords

ANNEALING; DYE LASERS; GLASS; MICROFLUIDICS; MICROORGANISMS; ULTRASHORT PULSES;

3D MICROFABRICATION; BIOCHEMICAL ANALYSIS; LASER DIRECT WRITING; MICROCHIPS;

MICROFABRICATION;

EID: 34247556464     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.01.072     Document Type: Article

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