|
|
Volumn 88, Issue 1, 2011, Pages 6-10
|
|
Laser-assisted patterning of solution-processed oxide semiconductor thin film using a metal absorption layer
a
a
a
a
a
|
|
Author keywords
Laser; Patterning; Solution processing; Zinc tin oxide
|
|
Indexed keywords
ALL-LASER PROCESS;
ELASTIC FORCE;
ELECTRONIC DEVICE;
LASER-ASSISTED;
METAL ABSORPTION;
METAL LAYER;
METAL THIN FILM;
MICROMETER SCALE;
ND-YAG LASERS;
OFF-CURRENT;
ON/OFF RATIO;
OXIDE SEMICONDUCTOR;
PATTERNING;
PATTERNING PROCESS;
SEMICONDUCTOR FILMS;
SEMICONDUCTOR STRUCTURE;
SINGLE PULSE;
SOLUTION PROCESSING;
SOLUTION-PROCESSED;
NEODYMIUM LASERS;
OXIDE FILMS;
SEMICONDUCTOR LASERS;
THIN FILM TRANSISTORS;
THIN FILMS;
TIN;
TIN OXIDES;
TITANIUM COMPOUNDS;
VAPOR DEPOSITION;
ZINC;
PULSED LASERS;
|
|
EID: 78049288976
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2010.07.042 Document Type: Article |
|
Times cited : (9)
|
|
References (28)
|
