Zno-channel thin-film transistors: Channel mobility

Journal of Applied Physics

Volumn 95, Issue 10, 2004, Pages 5813-5819

  Huffman, R L ^a  

^a HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL MOBILITY; DEVICE PERFORMANCE; MOBILITY METRICS; TRANSISTOR CHANNELS;

CARRIER MOBILITY; DEPOSITION; MATHEMATICAL MODELS; MOSFET DEVICES; OXIDATION; SILICON; SPUTTERING; SUBSTRATES; THIN FILM TRANSISTORS; VOLTAGE MEASUREMENT;

ZINC OXIDE;

EID: 2942609361     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1712015     Document Type: Article

References (14)

1. Y. Ohya, T. Niwa, T. Ban, and Y. Takahashi, Jpn. J. Appl. Phys., Part 1 40, 297 (2001).
2. S. Masuda, K. Kitamura, Y. Okumura, and S. Miyatake, J. Appl. Phys. 93, 1624 (2003).
3. R. L. Huffman, B. J. Norris, and J. F. Wager, Appl. Phys. Lett. 82, 733 (2003).
4. P. F. Garcia, R. S. McLean, M. H. Reilly, and G. Nunes, Jr., Appl. Phys. Lett. 82, 1117 (2003).
5. P. F. Garcia, R. S. McLean, M. H. Reilly, I. Malajovich, K. G. Sharp, S. Agrawal, and G. Nunes, Jr., Mater. Res. Soc. Symp. Proc. 769, H7.2.1 (2003).
6. J. Nishii, F. M. Hossain, S. Takagi, T. Aita, K. Saikusa, Y. Ohmaki, I. Ohkubo, S. Kishimoto, A. Ohtomo, T. Fukumura, F. Matsukura, Y. Ohno, H. Koinuma, H. Ohno, and M. Kawasaki, Jpn. J. Appl. Phys., Part 2 42, L347 (2003).
7. J. F. Wager, Science 300, 1245 (2003).
8. S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981).
9. D. K. Schroder, Semiconductor Material and Device Characterization, 2nd ed. (Wiley, New York, 1998).
10. R. Hoffman, M.S. Thesis, College of Engineering, Oregon State University (2002).
11. D. W. Greve, Field Effect Devices and Applications: Devices for Portable, Low-power, and Imaging Systems (Prentice-Hall, Upper Saddle River, N.J., 1993).
12. K. Lee, M. Shur, T. A. Fjeldly, and T. Ytterdal, Semiconductor Device Modeling for VLSI (Prentice-Hall, Upper Saddle River, N.J., 1993).
13. J. S. Rang, D. K. Schroder, and A. R. Alvarez, Solid-State Electron. 32, 679 (1989).
14. Y. Taur and T. H. King, Fundamentals of Modern VLSI Devices (Cambridge University Press, Cambridge, England, 1998).