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Volumn 20, Issue 24, 2009, Pages
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Parallelized laser-direct patterning of nanocrystalline metal thin films by use of a pulsed laser-induced thermo-elastic force
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Author keywords
[No Author keywords available]
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Indexed keywords
1064 NM;
BLOCK MODELS;
DEPOSITED METAL;
DIRECT-PATTERNING;
ELASTIC FORCE;
FILM PATTERNING;
GRAIN BOUNDARY REGIONS;
HIGH FIDELITY;
LOCALIZED ETCHING;
METAL THIN FILM;
MICROMETER SCALE;
NANOCRYSTALLINE METAL;
NANOCRYSTALLINE THIN FILMS;
NANOSIZED GRAINS;
ND-YAG LASERS;
PATTERNING PROCESS;
PHOTORESIST LAYERS;
PHOTORESIST-FREE;
POLYCRYSTALLINE;
PULSE ENERGIES;
PULSE WIDTH;
PULSED LASER;
SIMULATION MODEL;
SINGLE PULSE;
TRANSPARENT SUBSTRATE;
ELASTICITY;
GRAIN BOUNDARIES;
LASERS;
METAL RECOVERY;
METALS;
NANOCRYSTALLINE MATERIALS;
NEODYMIUM LASERS;
PHOTORESISTORS;
SUBSTRATES;
SURFACE TREATMENT;
THERMOELASTICITY;
THIN FILM DEVICES;
THIN FILMS;
PULSED LASER APPLICATIONS;
GLASS;
NANOCRYSTAL;
METAL;
NANOMATERIAL;
ARTICLE;
CHEMICAL ANALYSIS;
CHEMICAL BOND;
CHEMICAL STRUCTURE;
CRYSTAL STRUCTURE;
ELASTICITY;
ENERGY TRANSFER;
EVAPORATION;
FILM;
FORCE;
LASER;
MOLECULAR MODEL;
MOLECULAR SIZE;
NANOFABRICATION;
PRIORITY JOURNAL;
SIMULATION;
ARTIFICIAL MEMBRANE;
CHEMISTRY;
CONFORMATION;
CRYSTALLIZATION;
MACROMOLECULE;
MATERIALS TESTING;
MECHANICAL STRESS;
METHODOLOGY;
NANOTECHNOLOGY;
PARTICLE SIZE;
RADIATION EXPOSURE;
SURFACE PROPERTY;
TEMPERATURE;
ULTRASTRUCTURE;
YOUNG MODULUS;
CRYSTALLIZATION;
ELASTIC MODULUS;
LASERS;
MACROMOLECULAR SUBSTANCES;
MATERIALS TESTING;
MEMBRANES, ARTIFICIAL;
METALS;
MOLECULAR CONFORMATION;
NANOSTRUCTURES;
NANOTECHNOLOGY;
PARTICLE SIZE;
STRESS, MECHANICAL;
SURFACE PROPERTIES;
TEMPERATURE;
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EID: 67649204073
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/20/24/245301 Document Type: Article |
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Times cited : (22)
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References (24)
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