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Volumn 85, Issue 7, 1999, Pages 3837-3843
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Laser-assisted removal of particles on silicon wafers
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL CLEANING;
COMPUTER SIMULATION;
CONDENSATION;
EVAPORATION;
EXCIMER LASERS;
IMPURITIES;
LASER APPLICATIONS;
LASER PULSES;
MATHEMATICAL MODELS;
SILICA;
SILICON NITRIDE;
DEEP ULTRAVIOLET (DUV) EXCIMER LASERS;
DRY LASER CLEANING;
SILICON WAFERS;
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EID: 0344771168
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.369754 Document Type: Article |
Times cited : (118)
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References (22)
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