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Volumn 85, Issue 7, 1999, Pages 3837-3843

Laser-assisted removal of particles on silicon wafers

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; COMPUTER SIMULATION; CONDENSATION; EVAPORATION; EXCIMER LASERS; IMPURITIES; LASER APPLICATIONS; LASER PULSES; MATHEMATICAL MODELS; SILICA; SILICON NITRIDE;

EID: 0344771168     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369754     Document Type: Article
Times cited : (118)

References (22)
  • 5
    • 85034168273 scopus 로고    scopus 로고
    • US Patent Nos. 5,024,968 (June 18, 1991) and 5,099,477 (Mar. 31, 1992)
    • A. C. Engelsberg, US Patent Nos. 5,024,968 (June 18, 1991) and 5,099,477 (Mar. 31, 1992).
    • Engelsberg, A.C.1
  • 12
    • 0003342263 scopus 로고
    • Laser-Beam Interactions with Materials
    • Springer, Berlin
    • M. von Allmen, Laser-Beam Interactions with Materials, Springer Series in Materials Science, Vol. 2 (Springer, Berlin, 1987), pp. 62-65.
    • (1987) Springer Series in Materials Science , vol.2 , pp. 62-65
    • Von Allmen, M.1
  • 13
    • 0001497453 scopus 로고
    • edited by K. L. Mittal Plenum, New York
    • R. A. Bowling, in Particles on Surfaces, edited by K. L. Mittal (Plenum, New York, 1988), Vol. 1, p. 129.
    • (1988) Particles on Surfaces , vol.1 , pp. 129
    • Bowling, R.A.1
  • 16
    • 0004235026 scopus 로고
    • Wolfram Research Inc.
    • Mathematica version 2.2, Wolfram Research Inc. (1993).
    • (1993) Mathematica Version 2.2
  • 17
    • 0342328635 scopus 로고
    • edited by K. L. Mittal Plenum, New York
    • R. Kaiser, in Particles on Surfaces, edited by K. L. Mittal (Plenum, New York, 1989), Vol. 2, p. 269.
    • (1989) Particles on Surfaces , vol.2 , pp. 269
    • Kaiser, R.1
  • 18
    • 0004254886 scopus 로고
    • Properties of Silicon
    • IEE, London
    • Properties of Silicon, EMIS Datareviews Series 4 (IEE, London, 1988). pp. 1015, 1031.
    • (1988) EMIS Datareviews Series , vol.4 , pp. 1015


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.