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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 5, 2010, Pages

Ti/Au Ohmic contacts to indium zinc oxide thin films on paper substrates

(5) Khanna, R a Douglas, E A a Norton, D P a Pearton, S J a Ren, F a

a University of Florida (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CONTACT RESISTANCE; ELECTRIC CONTACTORS; FIELD EMISSION; INDIUM; OHMIC CONTACTS; ZINC; ZINC OXIDE;

ANNEALED SAMPLES; ANNEALING TEMPERATURES; CURRENT TRANSPORT; INDIUM ZINC OXIDES; LOW RESISTANCE; LOW TEMPERATURE PROCESSING; LOW TEMPERATURES; METALLIZATIONS; NO ANNEALING; PAPER SUBSTRATE; SPECIFIC CONTACT RESISTIVITY; TRANSFER RESISTANCE;

OXIDE FILMS;

EID: 77957734876 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3467507 Document Type: Article

Times cited : (8)

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