Comparison testing of diamond-like a-C:H coatings prepared in plasma cathode-based gas discharge and ta-C coatings deposited by vacuum arc

Surface and Coatings Technology

Volumn 204, Issue 24, 2010, Pages 4018-4024

  Gavrilov, N V ^a   Mamaev, A S ^a   Plotnikov, S A ^b   Rubshtein, A P ^b   Trakhtenberg, I Sh ^b   Ugov, V A ^b  

^a INSTITUTE OF ELECTROPHYSICS   (Russian Federation)

^b INSTITUTE OF METAL PHYSICS   (Russian Federation)

Author keywords

Amorphous carbon coatings; Low friction; Nano indentation; PACVD; Pulsed DC discharge

Indexed keywords

A-C:H FILMS; AMORPHOUS CARBON COATING; AVERAGE SURFACE ROUGHNESS; CATHODIC VACUUM ARCS; COMPARISON TESTING; DC GLOW DISCHARGE; DEPOSITED COATINGS; DIAMOND-LIKE; DISCHARGE GAPS; FRICTION COEFFICIENTS; GAS DISCHARGE; GAS PRESSURES; HOLLOW CATHODES; IN-SITU; INTERNAL STRESS; ION CLEANING; LOW FRICTION; NON-SELF-SUSTAINED DISCHARGE; PLASMA CATHODE; PLASMA IMMERSION ION IMPLANTATION; PULSED-DC DISCHARGE; SAMPLE SURFACE; SEM; STAINLESS STEEL SUBSTRATES; VACUUM ARCS;

ACETYLENE; AMORPHOUS CARBON; ATOMIC SPECTROSCOPY; FRICTION; GLOW DISCHARGES; ION IMPLANTATION; PLASMA APPLICATIONS; PLASMAS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; SURFACE CLEANING; SURFACE ROUGHNESS; TRIBOLOGY; TUNGSTEN; TUNGSTEN CARBIDE; VACUUM; VACUUM APPLICATIONS;

VACUUM DEPOSITED COATINGS;

EID: 77954176751     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.05.020     Document Type: Article

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