Characterization of diamond-like carbon thin films produced by pulsed-DC low pressure plasma monitored by a Langmuir probe in time-resolved mode

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1062-1066

  Corbella, C ^a   Pascual, E ^a   Gomez M A ^a   Polo, M C ^a   Garcia Cespedes J ^a   Andujar J L ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Diamond like carbon; Langmuir probe; Mechanical properties; Pulsed DC glow discharge

Indexed keywords

COMPOSITION; DEPOSITION; ELECTRIC POTENTIAL; ELECTRON TRANSITIONS; MOLECULAR WEIGHT; PHYSICAL PROPERTIES; PLASMA APPLICATIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRESSES;

BIOCOMPATABILITY; LANGMUIR PROBE; PULSED-DC GLOW DISCHARGE; ULTRA-HIGH MOLECULEAR WEIGHT POLYETHYLENE (UHMWPE);

DIAMOND LIKE CARBON FILMS;

EID: 18444385707     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.059     Document Type: Conference Paper

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