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Volumn 517, Issue 17, 2009, Pages 4916-4920
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The study of adhesion and nanomechanical properties of DLC films deposited on tool steels
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Author keywords
Diamond like carbon; Mechanical properties; Nanoindentation; Plasma immersion ion implantation; Scratch test
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Indexed keywords
DIAMOND LIKE CARBON;
DLC FILM;
IMPLANTATION DEPTH;
NANO-SCRATCH;
NANOMECHANICAL PROPERTY;
PLASMA IMMERSION ION IMPLANTATION;
RAMAN ANALYSIS;
SCRATCH TEST;
STEEL SUBSTRATE;
STEEL SURFACE;
TEM;
YOUNG'S MODULUS;
ADHESION;
CARBON FILMS;
DIAMOND FILMS;
DIAMONDS;
ION BOMBARDMENT;
ION IMPLANTATION;
MECHANICAL PROPERTIES;
MICROSTRUCTURE;
NANOINDENTATION;
NITROGEN;
PLASMA APPLICATIONS;
PLASMAS;
STEEL;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
WEAR RESISTANCE;
X RAY DIFFRACTION;
DIAMOND LIKE CARBON FILMS;
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EID: 65649153384
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2009.03.124 Document Type: Article |
Times cited : (48)
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References (8)
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