Effect of ion implantation layer on adhesion of DLC film by plasma-based ion implantation and deposition

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6647-6650

  Oka, Y ^a   Nishijima, M ^b   Hiraga, K ^b   Yatsuzuka, M ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Adhesive strength; DLC; EDS; PBIID; STEM

Indexed keywords

ADHESION; CARBON; DEPOSITION; INTERFACES (MATERIALS); ION IMPLANTATION; MULTILAYERS; SILICON;

ADHESIVE STRENGTH; MULTILAYER INTERFACE; PLASMA-BASED ION IMPLANTATION AND DEPOSITION;

DIAMOND LIKE CARBON FILMS;

ADHESION; CARBON; DEPOSITION; DIAMOND LIKE CARBON FILMS; INTERFACES (MATERIALS); ION IMPLANTATION; MULTILAYERS; SILICON;

EID: 33847378493     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.027     Document Type: Article

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