SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 516, Issue 8, 2008, Pages 1683-1692

Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam

(4) Silinskas, M a Grigonis, A b Kulikauskas, V c Manika, I d

a OTTO VON GUERICKE UNIVERSITY (Germany)

b KAUNAS UNIVERSITY OF TECHNOLOGY (Lithuania)

c MOSCOW STATE UNIVERSITY (Russian Federation)

d UNIVERSITY OF LATVIA (Latvia)

Author keywords

Acetylene; Amorphous hydrogenated carbon; Elastic recoil detection; Hydrogen; Ion beam deposition; Raman spectroscopy; Rutherford backscattering experiments

Indexed keywords

ACETYLENE; HYDROGEN; ION BEAM ASSISTED DEPOSITION; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON; ELASTIC RECOIL DETECTION; HYDROGEN DILUTION; MICROHARDNESS MEASUREMENTS;

CARBON FILMS;

EID: 38649098790 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2007.05.015 Document Type: Article

Times cited : (29)

References (41)

1
- 0033364588
- Gopinathan N., Robinson C., and Ryan F. Thin Solid films 355/356 (1999) 401
- (1999) Thin Solid films , vol.355-356 , pp. 401
- Gopinathan, N.¹ Robinson, C.² Ryan, F.³

2
- 38649137084
- Ostrovskaya Yu.L. Vacuum 66 (2002) 219
- (2002) Vacuum , vol.66 , pp. 219
- Ostrovskaya, Yu.L.¹

3
- 0037375859
- Robertson J. Tribol. Int. 36 (2003) 405
- (2003) Tribol. Int. , vol.36 , pp. 405
- Robertson, J.¹

4
- 13444270614
- Kim H.-G., Ahn S.-H., Kim J.-G., Park S.J., and Lee K.-R. Thin Solid films 475 (2005) 291
- (2005) Thin Solid films , vol.475 , pp. 291
- Kim, H.-G.¹ Ahn, S.-H.² Kim, J.-G.³ Park, S.J.⁴ Lee, K.-R.⁵

5
- 30244535151
- Robertson J., and O'Reilly E.P. Phys. Rev., B 35 (1987) 2946
- (1987) Phys. Rev., B , vol.35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.P.²

6
- 0000136079
- Robertson J. Diamond Relat. Mater. 4 (1995) 297
- (1995) Diamond Relat. Mater. , vol.4 , pp. 297
- Robertson, J.¹

7
- 0037165927
- Robertson J. Mater. Sci. Eng., R Rep. 37 (2002) 129
- (2002) Mater. Sci. Eng., R Rep. , vol.37 , pp. 129
- Robertson, J.¹

8
- 0001188118
- Schwarz-Selinger T., von Keudel A., and Jacob W.J. J. Appl. Phys. 86 (1999) 3988
- (1999) J. Appl. Phys. , vol.86 , pp. 3988
- Schwarz-Selinger, T.¹ von Keudel, A.² Jacob, W.J.³

9
- 38649114507
- Dillon R.O., Abbas A., Ianno N.J., and Ahmad A. J. Vac. Sci. Technol., A, Vac. Surf. Films 19 (2001) 2926
- (2001) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.19 , pp. 2926
- Dillon, R.O.¹ Abbas, A.² Ianno, N.J.³ Ahmad, A.⁴

10
- 0242603790
- Ferrari C., and Robertson J. Phys. Rev., B 61 (2000) 14095
- (2000) Phys. Rev., B , vol.61 , pp. 14095
- Ferrari, C.¹ Robertson, J.²

11
- 0027698910
- Grill A., and Patel V. Diamond Relat. Mater. 2 (1993) 1519
- (1993) Diamond Relat. Mater. , vol.2 , pp. 1519
- Grill, A.¹ Patel, V.²

12
- 0032090710
- Paterson M.J. Diamond Relat. Mater. 7 (1998) 908
- (1998) Diamond Relat. Mater. , vol.7 , pp. 908
- Paterson, M.J.¹

13
- 0036150219
- von Keudell A. Thin Solid Films 402 (2002) 1
- (2002) Thin Solid Films , vol.402 , pp. 1
- von Keudell, A.¹

14
- 0037219895
- Ban M., Hasegawa T., Fujii S., and Fujioka J. Diamond Relat. Mater. 12 (2003) 47
- (2003) Diamond Relat. Mater. , vol.12 , pp. 47
- Ban, M.¹ Hasegawa, T.² Fujii, S.³ Fujioka, J.⁴

15
- 2942534389
- Libardi J., Grigorov K., Massi M., Otani C., Ravagnani S.P., Maciel H.S., Guerino M., and Ocampo J.M.J. Thin Solid Films 459 (2004) 282
- (2004) Thin Solid Films , vol.459 , pp. 282
- Libardi, J.¹ Grigorov, K.² Massi, M.³ Otani, C.⁴ Ravagnani, S.P.⁵ Maciel, H.S.⁶ Guerino, M.⁷ Ocampo, J.M.J.⁸

16
- 23044495323
- Mikami T., Nakazawa H., Kudo M., and Mashita M. Thin Solid Films 488 (2005) 87
- (2005) Thin Solid Films , vol.488 , pp. 87
- Mikami, T.¹ Nakazawa, H.² Kudo, M.³ Mashita, M.⁴

17
- 18444396934
- Casiraghi C., Piazza F., Ferrari A.C., Garmbole D., and Robertson J. Diamond Relat. Mater. 14 (2005) 1098
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1098
- Casiraghi, C.¹ Piazza, F.² Ferrari, A.C.³ Garmbole, D.⁴ Robertson, J.⁵

18
- 7544239894
- Suzuki M., Ohana T., and Tanaka A. Diamond Relat. Mater. 13 (2004) 2216
- (2004) Diamond Relat. Mater. , vol.13 , pp. 2216
- Suzuki, M.¹ Ohana, T.² Tanaka, A.³

19
- 0028513408
- Tamor M.A., and Vassel W.C. J. Appl. Phys. 76 (1994) 3823
- (1994) J. Appl. Phys. , vol.76 , pp. 3823
- Tamor, M.A.¹ Vassel, W.C.²

20
- 0034271566
- Zhou X.T., Lee S.T., Bello I., Cheung A.C., Chiu D.S., Lam Y.W., Lee C.S., Leung K.M., and He X.M. Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 77 (2000) 229
- (2000) Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. , vol.77 , pp. 229
- Zhou, X.T.¹ Lee, S.T.² Bello, I.³ Cheung, A.C.⁴ Chiu, D.S.⁵ Lam, Y.W.⁶ Lee, C.S.⁷ Leung, K.M.⁸ He, X.M.⁹

21
- 0036508233
- Silinskas M., and Grigonis A. Diamond Relat. Mater. 11 (2002) 1026
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1026
- Silinskas, M.¹ Grigonis, A.²

22
- 2942687788
- Grigonis A., Sablinskas V., Silinskas M., and Tribandis D. Vacuum 75 (2004) 261
- (2004) Vacuum , vol.75 , pp. 261
- Grigonis, A.¹ Sablinskas, V.² Silinskas, M.³ Tribandis, D.⁴

23
- 0032017608
- Konac G., Kalbitzer S., Klatt Ch., Niemann D., and Stoll R. Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 136 (1998) 159
- (1998) Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms , vol.136 , pp. 159
- Konac, G.¹ Kalbitzer, S.² Klatt, Ch.³ Niemann, D.⁴ Stoll, R.⁵

24
- 32144459568
- Lifshitz Y., Kasi S.R., Rabalais J.W., and Eckstein W. Phys. Rev., B 41 (1990) 10468
- (1990) Phys. Rev., B , vol.41 , pp. 10468
- Lifshitz, Y.¹ Kasi, S.R.² Rabalais, J.W.³ Eckstein, W.⁴

25
- 0032482860
- Jacob W. Thin Solid Films 326 (1998) 1
- (1998) Thin Solid Films , vol.326 , pp. 1
- Jacob, W.¹

26
- 0003891820
- Sattel S., Robertson J., Tass Z., Scheib M., Wiescher D., and Ehrhardt H. Diamond Relat. Mater. 6 (1997) 255
- (1997) Diamond Relat. Mater. , vol.6 , pp. 255
- Sattel, S.¹ Robertson, J.² Tass, Z.³ Scheib, M.⁴ Wiescher, D.⁵ Ehrhardt, H.⁶

27
- 33749233512
- Casiraghi C., Ferrari A.C., and Robertson J. Phys. Rev., B 72 (2005) 085401
- (2005) Phys. Rev., B , vol.72 , pp. 085401
- Casiraghi, C.¹ Ferrari, A.C.² Robertson, J.³

28
- 0036543392
- Vietzke E. J. Nucl. Sci. Technol. 39 (2002) 363
- (2002) J. Nucl. Sci. Technol. , vol.39 , pp. 363
- Vietzke, E.¹

29
- 0041323098
- Hopf C., Von keudell A., and Jacob W. J. Appl. Phys. 94 (2003) 2373
- (2003) J. Appl. Phys. , vol.94 , pp. 2373
- Hopf, C.¹ Von keudell, A.² Jacob, W.³

30
- 0001276268
- Hopf C., Schwarz-Selinger T., Jacob W., and von Keudel A. J. Appl. Phys. 87 (2000) 2719
- (2000) J. Appl. Phys. , vol.87 , pp. 2719
- Hopf, C.¹ Schwarz-Selinger, T.² Jacob, W.³ von Keudel, A.⁴

31
- 0001344845
- von Keudel A., Schwarz-Selinger T., and Jakob W. J. Appl. Phys. 89 (2001) 2979
- (2001) J. Appl. Phys. , vol.89 , pp. 2979
- von Keudel, A.¹ Schwarz-Selinger, T.² Jakob, W.³

32
- 4444251603
- Nakazawa H., Yamagata Y., Suemitsu M., and Mashita M. Thin Solid Films 467 (2004) 98
- (2004) Thin Solid Films , vol.467 , pp. 98
- Nakazawa, H.¹ Yamagata, Y.² Suemitsu, M.³ Mashita, M.⁴

33
- 38649124166
- Grigonis A., Rutkuniene Z., and Silinskas M. Lith. J. Phys. 44 (2004) 329
- (2004) Lith. J. Phys. , vol.44 , pp. 329
- Grigonis, A.¹ Rutkuniene, Z.² Silinskas, M.³

34
- 0037455350
- Piazza F., Golanski A., Schulze S., and Relihan G. Appl. Phys. Lett. 82 (2003) 358
- (2003) Appl. Phys. Lett. , vol.82 , pp. 358
- Piazza, F.¹ Golanski, A.² Schulze, S.³ Relihan, G.⁴

35
- 0031995333
- Dowling D.P., Donnelly K., Monclus M., and McGuinness M. Diamond Relat. Mater. 7 (1998) 432
- (1998) Diamond Relat. Mater. , vol.7 , pp. 432
- Dowling, D.P.¹ Donnelly, K.² Monclus, M.³ McGuinness, M.⁴

36
- 0001673205
- Fanchini G., Tagliaferro A., Dowling D.P., Donnelly K., McConnell M.L., Flood R., and Lang G. Phys. Rev., B 61 (2000) 5002
- (2000) Phys. Rev., B , vol.61 , pp. 5002
- Fanchini, G.¹ Tagliaferro, A.² Dowling, D.P.³ Donnelly, K.⁴ McConnell, M.L.⁵ Flood, R.⁶ Lang, G.⁷

37
- 17044382183
- Maitre N., Camelio S., Barranco A., Girardeau Th., and Breelle E. J. Non-Cryst. Solids 351 (2005) 877
- (2005) J. Non-Cryst. Solids , vol.351 , pp. 877
- Maitre, N.¹ Camelio, S.² Barranco, A.³ Girardeau, Th.⁴ Breelle, E.⁵

38
- 0034472749
- Azuma K., Inaba H., Tasaka K., and Shirai H. Jpn. J. Appl. Phys. 39 (2000) 6705
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 6705
- Azuma, K.¹ Inaba, H.² Tasaka, K.³ Shirai, H.⁴

39
- 0037051232
- Fedosenko G., Korzec D., Engelmann J., Lyebyedyev D., and Scheer H.C. Thin Solid Films 406 (2002) 275
- (2002) Thin Solid Films , vol.406 , pp. 275
- Fedosenko, G.¹ Korzec, D.² Engelmann, J.³ Lyebyedyev, D.⁴ Scheer, H.C.⁵

40
- 0032185305
- Ristein J., Stief R.T., Ley L., and Beyer W. J. Appl. Phys. 84 (1998) 3836
- (1998) J. Appl. Phys. , vol.84 , pp. 3836
- Ristein, J.¹ Stief, R.T.² Ley, L.³ Beyer, W.⁴

41
- 18444387989
- Grigonis A., Rutkuniene Z., Kopustinskas V., Babonas G.J., and Reza A. Vacuum 78 (2005) 593
- (2005) Vacuum , vol.78 , pp. 593
- Grigonis, A.¹ Rutkuniene, Z.² Kopustinskas, V.³ Babonas, G.J.⁴ Reza, A.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.