Diamond-like carbon films with End-Hall ion source enhanced chemical vapour deposition

Diamond and Related Materials

Volumn 16, Issue 2, 2007, Pages 220-224

  Pan, Y Q ^a   Yin, Y ^b  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Diamond like carbon films; End Hall ion source; Infrared transmission enhancement; PECVD

Indexed keywords

GERMANIUM; INFRARED TRANSMISSION; ION BOMBARDMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SILICON WAFERS;

DISCHARGED VOLTAGE; END HALL ION SOURCE; INFRARED TRANSMISSION ENHANCEMENT; ION BOMBARDMENT ENERGY;

DIAMOND LIKE CARBON FILMS;

EID: 33846279059     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.05.003     Document Type: Article

References (19)

1. Robertson J. Prog. Solid State Chem. 21 (1991) 199
2. Robertson J. Surf. Coat. Technol. 50 (1992) 185
3. Fourches N., and Turban G. Thin Solid Films 240 (1994) 28
4. Hong J., Goullet A., and Turban G. Thin Solid Films 352 (1999) 41
5. Yin Y., McKenzie R., Zhou J., and Das A. J. Appl. Phys. 79 (1996) 1563
6. Enisherlova K.L., Kontsevoi Yu.A., et al. Mater. Sci. Eng. B46 (1997) 137
7. Yin Y., and McKenzie D.R. Thin Solid Films 280 (1996) 90
8. Kaufman H.R., and Robinson R.S. Vacuum 39 (1989) 1175
9. Madocks J. Proceeding of 45th Annual Technical Conference of Society of Vacuum Coaters, Orlando, USA. ISSN :0737-592 (2002) 202
10. Lettington A.H., and Smith C. Diamond Relat. Mater. 1 (1992) 805
11. Alaluf M., Appelbaum J., Kilbanov L., Brinker D., et al. Thin Solid Films 256 (1995) 1
12. Coad E.J., Pickles C.S.J., Jilbert G.H., et al. Diamond Relat. Mater. 5 (1996) 640
13. Thornton J., and Penfold A. In: Vossen J., and Kern W. (Eds). Thin Film Processes (1978), Academic Press, New York
14. Davis C.A. Thin Solid Films 226 (1993) 30
15. Yin Y., McKenzie D., and Bilek M. Surf. Coat. Technol. 198 (2005) 156
16. McKenzie D.R., Yin Y., Marks N.A., Davis C.A., Pailthorpe B.A., Amaratumga G.A.J., and Veerasamy V.S. Diamond Relat. Mater. 3 (1994) 353
17. Sreejith K., Nuwad J., and Pillai C.G.S. Appl. Surf. Sci. 252 (2005) 296
18. Druz B., Zaritskiy I., Hoehn J., Polyakov V., Rukovishnikov A., and Novotny V. Diamond Relat. Mater. 10 (2001) 931
19. T. Fang, W. Chang, Applied Surface Science, in press, online available since September 23, 2005.