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Volumn 14, Issue 3-7, 2005, Pages 942-948
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Mechanism of sp3 bond formation in the growth of diamond-like carbon
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Author keywords
Deposition; Diamond like carbon; Mechanism; Sp3 bonding
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Indexed keywords
ACTIVATION ENERGY;
CHEMICAL BONDS;
CRYSTAL ATOMIC STRUCTURE;
DEPOSITION;
DIFFUSION;
ENERGY DISSIPATION;
FILM GROWTH;
ION BEAM ASSISTED DEPOSITION;
MATHEMATICAL MODELS;
DIAMOND-LIKE CARBON (DLC);
INTERSTITIAL SPECIES;
SP3 BONDING;
SUBPLANTATION;
DIAMOND LIKE CARBON FILMS;
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EID: 18444409993
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2004.11.028 Document Type: Conference Paper |
Times cited : (63)
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References (40)
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