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Volumn 12, Issue 10-11, 2003, Pages 1788-1792
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The analysis of microhardness measurement approach for characterization of hard coatings
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Author keywords
Carbon coating; Microhardness; Thin film
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Indexed keywords
COATING TECHNIQUES;
MICROHARDNESS;
MULTILAYERS;
REACTIVE ION ETCHING;
SPUTTERING;
SURFACE ROUGHNESS;
THIN FILMS;
HARD COATINGS;
MICROHARDNESS MEASUREMENT;
DIAMOND LIKE CARBON FILMS;
DIAMOND;
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EID: 0346750566
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(03)00288-7 Document Type: Article |
Times cited : (17)
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References (5)
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