Evaluation of microstructures and mechanical properties of diamond like carbon films deposited by filtered cathodic arc plasma

Thin Solid Films

Volumn 516, Issue 16, 2008, Pages 5440-5444

  Tsai, Pi Chuen ^a   Chen, Kuei Hsien ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

Cathodic arc plasma; Characterization; Diamond like carbon; Mechanical properties; Microstructure; Thin films deposition

Indexed keywords

CHARACTERIZATION; MECHANICAL PROPERTIES; MICROSTRUCTURE; RAMAN SCATTERING; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CATHODIC ARC PLASMAS; NANOINDENTATION TESTERS; THIN FILMS DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 44149120074     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.060     Document Type: Article

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