Characteristics of diamond-like carbon film synthesized on AISI 304 austenite stainless steel using plasma immersion ion implantation and deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 696-701

  Liang, J H ^a   Chen, M H ^a   Tsai, W F ^b   Lee, S C ^b   Ai, C F ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INSTITUTE OF NUCLEAR ENERGY RESEARCH   (Taiwan)

Author keywords

Adhesion; Diamond like carbon; Hardness; Plasma immersion ion implantation; Raman scattering spectroscopy; Stainless steel

Indexed keywords

AUSTENITE; DEPOSITION; HARDNESS TESTING; ION IMPLANTATION; NANOINDENTATION; PLASMAS; SYNTHESIS (CHEMICAL);

GLOW DISCHARGE SPECTROMETRY (GDS); PLASMA IMMERSION ION IMPLANTATION; ROCKWELL-C HARDNESS TESTER;

DIAMOND LIKE CARBON FILMS;

EID: 33947639656     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.143     Document Type: Article

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