Structural and tribological properties of nitrogen doped amorphous carbon thin films synthesized by CFUBM sputtering method for protective coatings

Applied Surface Science

Volumn 255, Issue 7, 2009, Pages 3913-3917

  Park, Yong Seob ^a   Hong, Byungyou ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

a C:N; CFUBM sputtering; Friction coefficient; Tribological properties

Indexed keywords

AMORPHOUS CARBON; BIAS VOLTAGE; CARBON FILMS; DENSITY OF GASES; DOPING (ADDITIVES); FILM GROWTH; FRICTION; HARDNESS; ION BOMBARDMENT; METALLIC FILMS; NITROGEN; PROTECTIVE COATINGS; SILICON WAFERS; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; TRIBOLOGY; WEAR RESISTANCE;

AMORPHOUS CARBON THIN FILMS; CFUBM SPUTTERING; CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING; FRICTION COEFFICIENTS; HIGH WEAR RESISTANCE; LOW FRICTION COEFFICIENTS; NITROGEN DOPED AMORPHOUS CARBON (A-C:N) FILMS; TRIBOLOGICAL PROPERTIES;

AMORPHOUS FILMS;

EID: 58149088400     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.07.190     Document Type: Article

References (18)

1. Liu A.Y., and Cohen M.L. Science 245 (1989) 841
2. Chen Y., Chung Y.-W., and Li S.-Y. Surf. Coat. Technol. 200 (2006) 4072
3. Palacio J.F., Bull S.J., Neidhardt J., and Hultman L. Thin Solid Films 494 (2006) 63
4. Charitidis C., and Logothetidis S. Thin Solid Films 482 (2005) 120
5. Wienss A., Neuhauser M., Schneider H.-H., Persch-Schuy G., Windeln J., Witke T., and Hartmann U. Diam. Relat. Mater. 10 (2001) 1024
6. Baia M., Katoa U.K., Umeharaa N., and Miyakeb Y. Thin Solid Films 377-378 (2000) 138
7. Ong C.W., Zhao X.-A., Tsang Y.C., Choy C.L., and Chan P.W. J. Mater. Sci. 32 (1997) 2347
8. Gruger H., Selbmann D., Wolf E., and Leonhardt A. J. Mater. Sci. 32 (1997) 2849
9. Ferrari A.C., Rodil S.E., and Robertson J. Diam. Relat. Mater. 12 (2003) 905
10. Riviere J.P., Texier D., Delafond J., Jaouen M., Mathe E.L., and Chaumont J. Mater. Lett. 61 (2007) 2855
11. Franceschini D.F., Achete C.A., and Freire Jr. F.L. Appl. Phys. Lett. 60 (1992) 3229
12. Guerino M., Massi M., Maciel H.S., Otani C., and Mansano R.D. Microelectron. J. 34 (2003) 639
13. Kulikovsky V., Bohac P., Franc F., Deineka A., Vorlicek V., and Jastrabik L. Diam. Relat. Mater. 10 (2001) 1076
14. Ferrari A.C., and Robertson J. Phys. Rev. B 61 20 (2000) 14095
15. Zheng X.T., Cao P.J., Li J.J., Wang x., and Jin Z.S. Surf. Coat. Technol. 173 (2003) 213
16. Logothetidis S., Gioti M., Patsalas P., and Charitidis C. Carbon 37 (1999) 765
17. Xu W., Fujimoto T., Li B., and Kojima I. Appl. Surf. Sci. 175-176 (2001) 456
18. Peng X.L., Baber Z.H., and Clyne T.W. Surf. Coat. Technol. 138 (2001) 23