In situ surface oxide reduction with pulsed arc discharge for maximum adhesion of diamond-like carbon coatings

Diamond and Related Materials

Volumn 17, Issue 12, 2008, Pages 2071-2074

  Tiainen, Veli Matti ^a   Soininen, Antti ^a   Alakoski, Esa ^a   Konttinen, Yrjö T ^b  

^a ORTON Invalid Foundation   (Finland)

^b Institute of Clinical Medicine   (Finland)

Author keywords

Diamond like carbon; Filtered pulsed arc discharge; Plasma deposition

Indexed keywords

ADHESION; CARBIDES; CARBON; CAVITY RESONATORS; CHEMICAL PROPERTIES; CHEMICAL VAPOR DEPOSITION; DIAMONDS; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; ELECTRIC LOAD MANAGEMENT; PLASMA DEPOSITION; PLASMAS; SILICON; WELDS;

ADHESION PROPERTIES; CARBIDE FORMATIONS; CARBON PLASMAS; DEPOSITION SYSTEMS; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBONS; DLC COATINGS; ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSES; FILTERED PULSED ARC DISCHARGE; FILTERED PULSED ARC DISCHARGES; HIGH ADHESIONS; HIGH ENERGIES; HIGH QUALITIES; HIGH-TEMPERATURE; IN-SITU; ION MIXING; OXIDE REDUCTIONS; PRACTICAL METHODS; PULSED ARC DISCHARGES; SILICON SUBSTRATES; SUBSTRATE INTERFACES; SURFACE OXIDE REDUCTIONS;

SUBSTRATES;

EID: 54149090213     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.07.013     Document Type: Article

References (38)

1. Barin I., and Knacke O. Thermochemical properties of inorganic substances (1973), Springer-Verlag, New York
2. Anttila A. In: McHargue C.J., Kossowski R., and Hofer W.O. (Eds). Structure-property relationships in surface modified ceramics, NATO ASI Series (1989), Kluwer, Dordrecht, The Netherlands 455
3. Lifshitz Y. Diamond Relat. Mater. 8 (1999) 1659
4. Robertson J. Mater. Sci. Eng. R37 (2002) 129
5. A. Anttila, J.-P. Hirvonen, J. Koskinen, US Patent 5078848 (1992).
6. Koskinen J., Hirvonen J.-P., and Anttila A. Appl. Phys. Lett. 47 (1986) 941
7. Anttila A., et al. Appl. Phys. Lett. 50 (1986) 132
8. Alakoski E., Tiainen V.-M., and Kiuru M. Diamond Relat. Mater. 15 (2006) 1677
9. Anttila A., Lappalainen R., Tiainen V.-M., and Hakovirta M. Adv. Mater. 9 (1997) 1161
10. Tiainen V.-M. Diamond Relat. Mater. 10 (2001) 153
11. Tiainen V.-M., Lappalainen R., and Anttila A. Vacuum 67 (2001) 599
12. Anttila A., Salo J., and Lappalainen R. Mater. Lett. 24 (1995) 153
13. Chhowalla M. Diamond Relat. Mater. 10 (2001) 1011
14. Utsumi T., Oka Y., Fujiwara E., and Yatsuzuka M. Nucl. Inst. Met. Phys. Res. 0042 257 (2007) 706
15. Astrakhantsev N.V., Krasov V.I., and Paperny V.L. J. Phys. D 28 (1995) 2514
16. Gorbunov S.P., Krasov V.I., and Paperny V.L. J. Phys. D 30 (1997) 1922
17. Artamonov M.F., Krasov V.I., and Paperny V.L. J. Phys. D 34 (1997) 3364
18. Beamson G., and Briggs D. High resolution XPS for organic polymers (1992), Wiley, New York
19. In: Chastain J., and King Jr. R.C. (Eds). Handbook of XPS, PHI (1995), Eden Prairie, Minnesota
20. Johansson L.-S., and Campbell J.M. Surf. Int. Anal. 36 (2004) 1018
21. Robertson J. Diamond Relat. Mater. 12 (2003) 79
22. Alakoski E., Kiuru M., Tiainen V.-M., and Anttila A. Diamond Relat. Mater. 12 (2003) 2115
23. Anders A., and Yushkov G. J. Appl. Phys. 96 (2004) 970
24. Oka Y., Nishijima M., Hiraga K., and Yatsuzuka M. IEEE Trans. Plasma Sci. 4 (2006) 1183
25. Oka Y., Nishijima M., Higara K., and Yatsuzuka M. Nucl. Instrum. Methods Phys. Res. B 257 (2007) 702
26. Oka Y., Nishijima M., Hiraga K., and Yatsuzuka M. Surf. Coat. Technol. 201 (2007) 6647
27. Malaczynski G.W., Elmoursi A.A., Leung C.H., Hamdi A.H., and Campbell A.B. J. Vac. Sci. Technol. 2 (1999) 813
28. Bilek M.M.M., McKenzie D.R., Tarrant R.N., Lim S.H.M., and McCulloch D.G. Surf. Coat. Technol. 156 (2002) 136
29. Alakoski E., Kiuru M., and Tiainen V.-M. Diamond Relat. Mater. 15 (2006) 34
30. Liao M., Chai M., Yao Z., Yang S., and Liu Z. Z. Wang J. Crystal Growth 233 (2001) 446
31. Tsong I.S.T., and Barber D.J. J. Mater. Sci. 8 (1973) 123
32. Sun Y.-M., Loranzo J., Ho H., Park H.J., Veldman S., and White J.M. Appl. Surf. Sci. 161 (2000) 115
33. Wan G., Yang P., Fu R.K.Y., Mei Y.F., Qiu T., Kwok S.C.H., Ho J.P.Y., Huang N., Wu X.L., and Chu P.K. Diamond Relat. Mater. 15 (2003) 1276
34. Hirvonen J.-P., Koskinen J., Torri P., Lappalainen R., and Anttila A. Nucl. Instrum. Methods B 118 (1996) 596
35. Hirvonen J.-P., Koskinen J., Lappalainen R., and Anttila A. Mat. Sci. Forum 52-53 (1989) 197
36. Anttila A., Lappalainen R., Heinonen H., Santavirta S., and Konttinen Y.T. New Diam. Front. Carbon. Technol. 9 (1999) 283
37. Lappalainen R., Selenius M., Anttila A., Konttinen Y.T., and Santavirta S. J. Biomed. Mater. Res. Part B: Appl. Biomater. 66B (2003) 410
38. Hijikata Y., Yaguchi H., Yoshikawa M., and Yoshida S. Appl. Surf. Sci. 184 (2001) 161