메뉴 건너뛰기




Volumn 100, Issue 1, 2010, Pages 287-296

Growth study of indium-catalyzed silicon nanowires by plasma enhanced chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

CATALYTIC ACTIVITY; CRYSTAL QUALITIES; CUBIC STRUCTURE; GROWTH CONDITIONS; GROWTH DIRECTIONS; HIGH DENSITY; HYDROGEN PLASMAS; INDIUM DROPLET; NANOWIRE GROWTH; RAMAN SIGNATURES; SILANE PLASMAS; SILICON NANOWIRES;

EID: 77954085114     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-010-5802-1     Document Type: Article
Times cited : (51)

References (60)
  • 1
    • 0035793378 scopus 로고    scopus 로고
    • Functional nanoscale electronic devices assembled using silicon nanowire building blocks
    • DOI 10.1126/science.291.5505.851
    • Y. Cui C.M. Lieber 2001 Science 291 851 10.1126/science.291.5505.851 2001Sci...291..851C (Pubitemid 32120751)
    • (2001) Science , vol.291 , Issue.5505 , pp. 851-853
    • Cui, Y.1    Lieber, C.M.2
  • 9
    • 41749110900 scopus 로고    scopus 로고
    • Outperforming the conventional scaling rules in the quantum-capacitance limit
    • DOI 10.1109/LED.2008.917816
    • J. Knoch W. Riess J. Appenzeller 2008 IEEE Trans. Electron Devices 29 372 10.1109/LED.2008.917816 (Pubitemid 351486785)
    • (2008) IEEE Electron Device Letters , vol.29 , Issue.4 , pp. 372-374
    • Knoch, J.1    Riess, W.2    Appenzeller, J.3
  • 10
    • 3242701624 scopus 로고    scopus 로고
    • 10.1103/PhysRevLett.92.236805 2004PhRvL.92w6805Z
    • X. Zhao C.M. Wei L. Yang M.Y. Chou 2004 Phys. Rev. Lett. 92 236805 10.1103/PhysRevLett.92.236805 2004PhRvL..92w6805Z
    • (2004) Phys. Rev. Lett. , vol.92 , pp. 236805
    • Zhao, X.1    Wei, C.M.2    Yang, L.3    Chou, M.Y.4
  • 13
    • 0010911965 scopus 로고
    • 10.1016/0022-0248(75)90105-0 1975JCrGr.31.20G
    • E.I. Givarzigov 1975 J. Cryst. Growth 31 20 10.1016/0022-0248(75)90105-0 1975JCrGr..31...20G
    • (1975) J. Cryst. Growth , vol.31 , pp. 20
    • Givarzigov, E.I.1
  • 14
    • 33947119637 scopus 로고    scopus 로고
    • Dimensional evolution of silicon nanowires synthesized by Au-Si island-catalyzed chemical vapor deposition
    • DOI 10.1016/j.physe.2006.07.017, PII S1386947706004255
    • D.W. Kwak H.Y. Cho W.C. Yang 2007 Physica E 37 153 10.1016/j.physe.2006. 07.017 2007PhyE...37..153K (Pubitemid 46401455)
    • (2007) Physica E: Low-Dimensional Systems and Nanostructures , vol.37 , Issue.1-2 , pp. 153-157
    • Kwak, D.W.1    Cho, H.Y.2    Yang, W.-C.3
  • 15
    • 1642528452 scopus 로고    scopus 로고
    • Controlled growth and structures of molecular-scale silicon nanowires
    • DOI 10.1021/nl035162i
    • Y. Wu Y. Cui L. Huynh C.J. Barrelet D.C. Bell C.M. Lieber 2004 Nano Lett. 4 433 10.1021/nl035162i 2004NanoL...4..433W (Pubitemid 38402628)
    • (2004) Nano Letters , vol.4 , Issue.3 , pp. 433-436
    • Wu, Y.1    Cui, Y.2    Huynh, L.3    Barrelet, C.J.4    Bell, D.C.5    Lieber, C.M.6
  • 16
    • 19944379818 scopus 로고    scopus 로고
    • Diameter-dependent growth direction of epitaxial silicon nanowires
    • DOI 10.1021/nl050462g
    • V. Schmidt S. Senz U. Gösele 2005 Nano Lett. 5 931 10.1021/nl050462g 2005NanoL...5..931S (Pubitemid 40749057)
    • (2005) Nano Letters , vol.5 , Issue.5 , pp. 931-935
    • Schmidt, V.1    Senz, S.2    Gosele, U.3
  • 17
    • 28844484557 scopus 로고    scopus 로고
    • Sawtooth faceting in silicon nanowires
    • DOI 10.1103/PhysRevLett.95.146104, 146104
    • F.M. Ross J. Tersoff M.C. Reuter 2005 Phys. Rev. Lett. 95 146104 10.1103/PhysRevLett.95.146104 2005PhRvL..95n6104R (Pubitemid 41777594)
    • (2005) Physical Review Letters , vol.95 , Issue.14 , pp. 1-4
    • Ross, F.M.1    Tersoff, J.2    Reuter, M.C.3
  • 34
    • 34547225646 scopus 로고    scopus 로고
    • Influence of Cu as a catalyst on the properties of silicon nanowires synthesized by the vapour-solid-solid mechanism
    • DOI 10.1088/0957-4484/18/30/305606, PII S0957448407491887
    • J. Arbiol B. Kalache P. Roca i Cabarrocas J.R. Morante A. Fontcuberta i Morral 2007 Nanotechnology 18 305606 10.1088/0957-4484/18/30/305606 (Pubitemid 47121750)
    • (2007) Nanotechnology , vol.18 , Issue.30 , pp. 305606
    • Arbiol, J.1    Kalache, B.2    Cabarrocas, P.R.I.3    Morante, J.R.4    Morral, A.F.I.5
  • 40
    • 46949085162 scopus 로고    scopus 로고
    • 10.1007/s11837-007-0072-x
    • S. Luidold H. Antrekowitsch 2007 JOM 59 6 20 10.1007/s11837-007-0072-x
    • (2007) JOM , vol.59 , Issue.6 , pp. 20
    • Luidold, S.1    Antrekowitsch, H.2
  • 42
    • 33644780780 scopus 로고    scopus 로고
    • The influence of the surface migration of gold on the growth of silicon nanowires
    • DOI 10.1038/nature04574, PII N04574
    • J.B. Hannon S. Kodambaka F.M. Ross R.M. Tromp 2006 Nature 440 69 10.1038/nature04574 2006Natur.440...69H (Pubitemid 43336267)
    • (2006) Nature , vol.440 , Issue.7080 , pp. 69-71
    • Hannon, J.B.1    Kodambaka, S.2    Ross, F.M.3    Tromp, R.M.4
  • 44
    • 49649159403 scopus 로고
    • 10.1016/0022-0248(71)90188-6 1971JCrGr.10.223B
    • G.A. Bootsma H.J. Gassen 1971 J. Cryst. Growth 10 223 10.1016/0022-0248(71)90188-6 1971JCrGr..10..223B
    • (1971) J. Cryst. Growth , vol.10 , pp. 223
    • Bootsma, G.A.1    Gassen, H.J.2
  • 45
    • 17944376542 scopus 로고    scopus 로고
    • Growth rate of silicon nanowires
    • DOI 10.1063/1.1888034, 123109
    • J. Kikkawa Y. Ohno S. Takeda 2005 Appl. Phys. Lett. 86 123109 10.1063/1.1888034 2005ApPhL..86l3109K (Pubitemid 40596937)
    • (2005) Applied Physics Letters , vol.86 , Issue.12 , pp. 1-3
    • Kikkawa, J.1    Ohno, Y.2    Takeda, S.3
  • 46
    • 16244388903 scopus 로고    scopus 로고
    • Controlled growth of Si nanowire arrays for device integration
    • DOI 10.1021/nl047990x
    • A.I. Hochbaum R. Fan R.R. He P.D. Yang 2005 Nano Lett. 5 457 10.1021/nl047990x 2005NanoL...5..457H (Pubitemid 40449715)
    • (2005) Nano Letters , vol.5 , Issue.3 , pp. 457-460
    • Hochbaum, A.I.1    Fan, R.2    He, R.3    Yang, P.4
  • 48
    • 34250629761 scopus 로고    scopus 로고
    • Synthesis of vertical high-density epitaxial Si(100) nanowire arrays on a Si(100) substrate using an anodic aluminum oxide template
    • DOI 10.1002/adma.200700153
    • T. Shimizu T. Xie J. Nishikawa S. Shingubara S. Senz U. Gosele 2007 Adv. Mater. 19 917 10.1002/adma.200700153 (Pubitemid 46942286)
    • (2007) Advanced Materials , vol.19 , Issue.7 , pp. 917-920
    • Shimizu, T.1    Xie, T.2    Nishikawa, J.3    Shingubara, S.4    Senz, S.5    Gosele, U.6
  • 50
    • 0035797847 scopus 로고    scopus 로고
    • Bicrystalline silicon nanowires
    • DOI 10.1002/1521-4095(200110)13:19<1489::AID-ADMA1489>3.0.CO;2-E
    • A.H. Carim K.K. Lew J.M. Redwing 2001 Adv. Mater. 13 1490 10.1002/1521-4095(200110)13:19<1489::AID-ADMA1489>3.0.CO;2-E (Pubitemid 32969836)
    • (2001) Advanced Materials , vol.13 , Issue.19 , pp. 1489-1491
    • Carim, A.H.1    Lew, K.-K.2    Redwing, J.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.