Polysilicon micro beams buckling with temperature-dependent properties

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 957-961

  Shamshirsaz, M ^a   Asgari, M B ^b  

^a AMIRKABIR UNIVERSITY OF TECHNOLOGY   (Iran)

^b SHAHID BEHESHTI UNIVERSITY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; POLYSILICON; TEMPERATURE DISTRIBUTION; THERMOELASTICITY;

ANALYTICAL MODELS; COEFFICIENT OF THERMAL EXPANSION (CTE); TEMPERATURE DEPENDENT BUCKLING;

MICROSYSTEMS;

EID: 44249110006     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0589-0     Document Type: Conference Paper

References (21)

1. Atre A (2006) Analysis out-of-plane thermal microactuators. J Micromech Microeng 16:205-213
2. Chen RS, Kung C, Lee GB (2002) Analysis of the optimal dimension on the electrothermal microactuator. J Micromech Microeng 12:291-296
3. Chiao M, Lin L (2000) Self-buckling of micromachined beams under resistive heating. J Micromech Microeng 9:146-151
4. Comtois JH Bright VM (1997) Application for surface-micromachined polysilicon thermal actuators and arrays. Sensors Actuators A 58:19-25
5. Comtois JH, Michalicek MA, Barron CC (1998) Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon. Sensors Actuators A 70:23-31
6. Geisberger AA, Sarkar N, Ellis M, Skidmore D (2003) Electrothermal properties and modeling of polysilicon microthermal actuators. J Microelectromech Syst 12(4):513-523
7. Huang QA, Lee NKS (2000) A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators. Sensors Actuators A 80:267-272
8. Huang QA, Lee NKS (1999) Analysis and design of polysilicon thermal flexure actuator. J Micromech Microeng 9:64-70
9. Kuang Y, Huang QA, Lee NKS (2002) Numerical simulation of polysilicon thermal flexure actuator. Microsyst Technol 8:17-21
10. Lin L, Chiao (1998) Electro thermal and elastic characterizations of suspended micro beams. Microelectron J 29:269-276
11. Lin L, Chiao M (1996) Electrothermal responses of lineshape microstructures. Sensors Actuators A 55:35-41
12. Lott CD, Mclain TW, Harb JN, Howell LL (2002) Modeling the thermal behavior of a surface-micromachined linear displacement thermomechanical microactuator. Sensors Actuators A 101:239-250
13. Mankame ND, Ananthasuresh GK (2001) Comprehensive thermal modeling and characterization of an electro-thermal compliant microactuator. J Micromech Microeng 11:452-462
14. Pan CH (2002) A simple method for determining linear thermal expansion coefficient of thin films. J Micromech. Microeng 12:548-555
15. Pan CS, Hsu W (1997) An electro-thermally and laterally driven polysilicon microactuators. J Micromech Microeng 7:7-13
16. Shamshirsaz M, Bahrami M, Tayefeh M (2003) Finite element analysis of time-dependent buckling of polysilicon micro beams with temperature-dependent properties. Int J of Computational Eng Sci 4(2):393-396
17. Shamshirsaz M and Gheisarieha M (2004) Analysis of polysilicon electrothermal flexure microactuators with temperature-dependent properties.In: Proceedings of European Micro Nano System(EMN04), Paris, October 20-21, vol 1, pp 113-116
18. Shamshirsaz M and Asgari M (2003) Effect of temperature-dependent thermo-Mechanical properties on electrothermal buckling of polysilicon micro beams.In:Proceedings of Micro System Technology, Munich, October 7-8, vol 1, pp 574-576
19. Sharpe W N, Eby M A and Coles G (2001) Effect of temperature on mechanical properties of polysilicon. In: Proceedings of Transducers, Munich, pp 1366-1369
20. Timoshenko S, Goodier JN (1970) Theory of elasticity, 3rd edn. McGraw-Hill, New York
21. Yan D, Khajehpour A, Mansour R (2003) Modeling of two-hot-arm horizontal thermal actuator. J Micromech Microeng 13:312-322