Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts

Microscopy and Microanalysis

Volumn 16, Issue 2, 2010, Pages 210-217

  Ke, Xiaoxing ^a   Bals, Sara ^a   Cott, Daire ^b   Hantschel, Thomas ^b   Bender, Hugo ^b   Van Tendeloo, Gustaaf ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b IMEC   (Belgium)

Author keywords

Carbon nanotubes; Electron tomography; FIB; Missing wedge; Patterned nanostructures; TEM

Indexed keywords

EID: 77952546029     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927609991371     Document Type: Article

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