Patterning of metallic nanoparticles for the growth of carbon nanotubes

Nanotechnology

Volumn 19, Issue 13, 2008, Pages

  Esconjauregui, Santiago ^a,b   Whelan, Caroline M ^a   Maex, Karen ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CRYSTAL GROWTH; LITHOGRAPHY; QUANTUM CONFINEMENT; SILICON WAFERS;

CATALYST DEPOSITION; NANOMETRIC DOMAINS; SEMICONDUCTOR PROCESSING TECHNOLOGY;

NANOPARTICLES;

CARBON NANOTUBE; COBALT; NANOPARTICLE; NICKEL; SILICON;

ARTICLE; CATALYST; NANOCHEMISTRY; NANOTECHNOLOGY; PRIORITY JOURNAL; SEMICONDUCTOR;

EID: 40549130691     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/13/135306     Document Type: Article

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