Improvement of synchrotron radiation mirrors below the 0.1-arcsec rms slope error limit with the help of a long trace profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3152, Issue , 1997, Pages 168-179

  Lammert, Heiner ^a   Senf, Friedmar ^a   Berger, Marion ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b Optikkomponenten und Kristalle   (Germany)

Author keywords

Figure measurement; Long trace profiler; Non contact measurement; Optical metrology; Optical polishing; Profilometry; Slope error; Temperature measurement; X ray optics

Indexed keywords

ELECTROMAGNETIC WAVES; ERRORS; MANUFACTURE; MIRRORS; POLISHING; PROFILOMETRY; RADIATION; RANDOM ERRORS; SURFACES; SYNCHROTRON RADIATION; SYNCHROTRONS; SYSTEMATIC ERRORS; TEMPERATURE MEASUREMENT;

FIGURE MEASUREMENT; LONG TRACE PROFILER; NON-CONTACT MEASUREMENT; OPTICAL METROLOGY; OPTICAL POLISHING; SLOPE ERROR; X-RAY OPTICS;

MEASUREMENTS;

EID: 0001592123     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295556     Document Type: Conference Paper

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