Systematic error reduction: Non-tilted reference beam method for long trace profiler

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6704, Issue , 2007, Pages

  Qian, Shinan ^a   Qian, Kun ^a   Hong, Yiling ^b   Sheng, Liusi ^b   Ho, Tonglin ^b   Takacs, Peter ^a  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LONG TRACE PROFILER (LTP); OPTICAL AXIS; SLIDE PITCH ERRORS; SYSTEMATIC ERROR REDUCTION;

OPTICAL SYSTEMS; PRISMS; SCANNING; SYNCHROTRON RADIATION;

ERROR ANALYSIS;

EID: 42149086700     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.740440     Document Type: Conference Paper

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