Stable zipping RF MEMS varactors

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Pu, Suan Hui ^a   Holmes, Andrew S ^a   Yeatman, Eric M ^a   Papavassiliou, Christos ^a   Lucyszyn, Stepan ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; CAPACITANCE RATIO; FABRICATION IMPERFECTIONS; LARGE TUNING RANGE; QUALITY FACTORS; RF-MEMS; SELF RESONANT FREQUENCY; SMALL DEVICES; TUNING RANGES;

ATOMIC FORCE MICROSCOPY; MEMS; NANOCANTILEVERS; NATURAL FREQUENCIES; TUNING;

VARACTORS;

EID: 77749335774     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035030     Document Type: Article

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