Electrostatic actuators with expanded tuning range due to biaxial intrinsic stress gradients

Journal of Microelectromechanical Systems

Volumn 13, Issue 1, 2004, Pages 51-62

  Gray, Gary D ^a   Morgan, Matthew J ^a   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROPLATING; ELECTROSTATIC ACTUATORS; MICROELECTRONIC PROCESSING; SEMICONDUCTOR DEVICE MANUFACTURE;

STRESS GRADIENTS; TUNING RANGE; VOLTAGE CYCLING;

MICROELECTROMECHANICAL DEVICES;

EID: 1542604501     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.823231     Document Type: Article

References (6)

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3. A. K. Chinthakindi and P. A. Kohl, "Electrostatic actuators with intrinsic stress gradient. Part-II," J. Electrochem. Soc., vol. 149, pp. H146-H152, 2002.
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