A high performance tunable RF MEMS switch using barium strontium titanate (BST) dielectrics for reconfigurable antennas and phased arrays

IEEE Antennas and Wireless Propagation Letters

Volumn 4, Issue 1, 2005, Pages 217-220

  Wang, Guoan ^a,b   Polley, Todd ^a,c   Hunt, Andrew ^a,c   Papapolymerou, John ^a,b  

^a IEEE   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c nGimat Co   (United States)

Author keywords

BST; Reeonfigurable system; RF MEMS; Tunable

Indexed keywords

BST; CAPACITIVE SWITCHES; RECONFIGURABLE SYSTEMS; RF MEMS; TUNABLE;

ANTENNA PHASED ARRAYS; BARIUM COMPOUNDS; CAPACITANCE; CHEMICAL VAPOR DEPOSITION; DIELECTRIC DEVICES; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY;

ELECTRIC SWITCHES;

EID: 31144445066     PISSN: 15361225     EISSN: None     Source Type: Journal    
DOI: 10.1109/LAWP.2005.851065     Document Type: Article

References (15)

1. S. Pancheo, L. Katehi, and T. Nguyen, "Design of low actuation voltage RF MEMS switch," in Proc. Microwave Symp. Dig. 2000 IEEE MTT-S Int., vol. 1, Boston, MA, Jun. 2000, pp. 165-168.
2. R. Tait. "An IC-compatible process for fabrication of RF switches and tunable capacitors," Can. J. Electr. Comput. Eng., vol. 25. no. 1, pp. 25-28, Jan. 2000.
3. K. Vinoy and V. K. Varadan, "Design of reconfigurable fractal antennas and RF-MEMS for space-based systems," Smart Materials and Structures, no. 10, pp. 1211-1223, 2001.
4. D. J. Yound and B. E. Boser, "A micromachined variable capacitor for monolithic low noise VCOs." in Proc. Tech. Dig. 1996 Solid-State Sensor and Actuator Workshop, Hilton Head Island. SC, pp. 86-89.
5. D. J. Young and B. E. Boser. "A micromachined-based RF low noise VCO," in Proc. IEEE Custom Integrated Circuits Conf., Santa Clara, CA, 1997. pp. 431-434.
6. H. D. Wu, K. F. Harsh, and R. S. Irwin. "MEMS designed for tunable capacitors," in Proc. 1998 IEEE MTT-S Int. Microwave Symp. Dig., Baltimore, MD, pp. 126-129.
7. A. Dec and K. Suyama, "RF micromachined varactors with wide tuning range." in Proc. 1998 IEEE MTT-S Int. Microwave, Symp. Dig., Baltimore, MD, pp. 357-360.
8. C. Goldsmith, T. H. Lin, B. Powers, W. R. Wu, and B. Norvell, "Micromechanical membrane switches for microwave applications," in Proc. 1995 IEEE MTT-S Int. Microwave Symp. Dig., Orlando, FL, pp. 91-94.
9. Y. Liu, T. R. Taylor, J. Speck, and R. York, "High-isolation BST-MEMS switches." in Proc. 2002 IEEE MTT-S Int. Microwave Symp. Dig., Seattle, WA, pp. 227-230.
10. G. Wang, S. Barstow, A. Jeyakumar, J. Papapolymerou, and C. Henderson, "Low cost RF MEMS switches using photodefinable mixed oxide dielectrics," in Proc. 2003 IEEE MTT-S Int. Microwave Symp. Dig., Philadelphia, PA. Jun., pp. 1633-36.
11. A. T. Hunt, W. B. Carter, and J. K. Cochran Jr., "Combustion chemical vapor deposition: A novel thin film deposition techniques," Appl. Phys. Lett., vol. 63, no. 2. p. 266, 1993.
12. A. T. Hunt, J. K. Cochran, and W. B. Carter, "Combustion chemical vapor deposition of films and coatings." U.S. Patent 5652021, Jul. 29, 1997.
13. A. T. Hunt, T. Hwang, and H. Shao, "Combustion chemical vapor deposition of phosphate films and coatings," U.S. Patent 5 858 465, Jan. 12, 1999.
14. A. T. Hunt, J. K. Cochran, and W. B. Carter, "Method for the combustion chemical vapor deposition of films and coatings," U.S. Patent 5 863 604, Jan. 26, 1999.
15. A. T. Hunt, J. K. Cochran, and W. B. Carter, "Method for the combustion chemical vapor depostion of films and coatings." U.S. Patent 6013318, Jan. 11, 2000.