A high-Q tunable micromechanical capacitor with movable dielectric for RF applications

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2000, Pages 489-492

  Yoon, Jun Bo ^a   Nguyen, Clark T C ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; INTEGRATED CIRCUITS; MICROMACHINING; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; TUNING;

MICROMECHANICAL CAPACITORS;

ELECTROLYTIC CAPACITORS;

EID: 0034454060     PISSN: 01631918     EISSN: None     Source Type: Journal    
DOI: 10.1109/IEDM.2000.904362     Document Type: Article

References (5)

1. A micromachined variable capacitor for monolithic low-noise VCO's
2. Micromachined electro-mechanically tunable capacitors and their applications to RF IC's
3. A 1.9GHz CMOS VCO with micromachined electromechanically tunable capacitors
4. Supercritical carbon dioxide drying of microstructures
5. Monolithic high-Q overhang inductors fabricated on silicon and glass substrates