Micromachined RF MEMS tunable capacitors using piezoelectric actuators

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2001, Pages 2111-2114

  Park, Jae Y ^a   Yee, Young J ^a   Nam, Hyo J ^a   Bu, Jong U ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; Q FACTOR MEASUREMENT; TUNING;

BIAS VOLTAGES; PIEZOELECTRIC ACTUATORS; TUNABLE CAPACITORS;

CAPACITORS;

EID: 0035686289     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. A 3 V 4 GHznMOS voltage-controlled oscillator with integrated resonator
2. Micromachined microwave actuator technology
3. High tuning-ratio MEMS-based tunable capacitors for RF communications applications
4. Micromachined varactor with wide tuning range
5. A micromachined variable capacitor for monolithic low-noise VCOs
6. MEMS designed forunable capacitors