MEMS microswitch arrays for reconfigurable distributed microwave components

IEEE MTT-S International Microwave Symposium Digest

Volumn 1, Issue , 2000, Pages 153-156

  Bozler, C ^a   Drangmeister, R ^a   Duffy, S ^a   Gouker, M ^a   Knecht, J ^a   Kushner, L ^a   Parr, R ^a   Rabe, S ^a   Travis, L ^a  

^a MIT LINCOLN LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSWITCH ARRAYS; MICROWAVE COMPONENTS; TUNABLE DISTRIBUTED CIRCUITS;

CAPACITANCE MEASUREMENT; CMOS INTEGRATED CIRCUITS; ELECTRIC CONTACTS; ELECTRIC NETWORK SYNTHESIS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; SWITCHES; TUNING;

MICROWAVE DEVICES;

EID: 0033678482     PISSN: 0149645X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MWSYM.2000.860909     Document Type: Article

References (6)

1. P.M. Zavracky, N.E. McGruer, R.H. Morrison, and D. Potter, "Microswitches and microrelays with a view toward microwave applications," Int. J. RF and Microwave CAE, vol. 9, no. 4, pp. 338-347, 1999.
2. C.L. Goldsmith, A. Malczewski, Z.J. Yao, S. Chen, J. Ehmke, and D.H. Hinzel, "RF MEMs Variable Capacitors for Tunable Filters," Int. J. RF and Microwave CAE, vol. 9, no. 4, pp. 362-374, 1999.
3. J. B. Muldavin and G. M. Rebeiz, "30 GHz tuned MEMs switches," IEEE 1999 IMS Digest, vol. 4, pp. 1511-1514, 1999.
4. S. Pacheco, C. T. Nguyen and L. P. B. Katehi, "Micromechanical electrostatic K-band switches," IEEE 1998 IMSDigest, vol. 3, pp. 1569-1572, 1998.
5. Daniel Hyman, et. al., Surface-micromachined RF MEMs switches on GaAs substrates," Int. J. RF and Microwave CAE, vol. 9, no. 4, pp. 348-361, 1999.
6. D. Swanson, "Using a Microstrip Bandpass Filter to Compare Different Circuit Analysis Techniques," Int. J. Microwave and Millimeter-Wave Computer-Aided Eng., vol. 5, no. 1, pp, 4-12, 1995