A MEMS high-Q tunable capacitor for reconfigurable microwave integrated circuits

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 1-8

  Nordquist, Christopher D ^a   Muyshondt, Arnoldo ^a   Pack, Michael V ^a   Finnegan, Patrick S ^a   Dyck, Christopher W ^a   Reines, Isak C ^a   Kraus, Garth M ^a   Sloan, George R ^a   Sullivan, Charles T ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Capacitor; Microwave; Monolithic; Reconfigurable; RF MEMS; Tunable

Indexed keywords

FABRICATION; LOW TEMPERATURE ENGINEERING; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RADIO FREQUENCY AMPLIFIERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SUBSTRATES; WAVEGUIDES;

TUNABLE CAPACITORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037721469     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.480768     Document Type: Conference Paper

References (14)

1. E. R. Brown, "RF-MEMS switches for reconfigurable integrated circuits," IEEE Trans. Microwave Theory Tech, 46, pp. 1868-1880, 1998
2. J. J. Yao, "RF MEMS from a device perspective," J. Micromech. Microeng. 10, pp. R9 - R38, 2000.
3. C. L. Goldsmith, Z. Yao, S. Eshelman, and D. Denniston, "Performance of Low-Loss RF MEMS Capacitive Switches," IEEE Microwave Guided Wave Lett 8, pp. 269-271, 1998
4. R. E. Mihailovich, M. Kim, J. B. Hacker, E. A. Sovero, J. Studer, J. A. Higgins, and J. F. DeNatale, "MEM Relay for Reconfigurable RF Circuits," IEEE Microwave and Wireless Components Lett. 11, pp. 53-55, 2001
5. S. Duffy, C. Bozler, S. Rabe, J. Knecht, L. Travis, P. Wyatt, C. Keast, and M. Gouker, "MEMS Microswitches for Reconfigurable Microwave Circuitry," IEEE Microwave and Wireless Components Lett. 11, pp. 106-108, 2001
6. J. B. Muldavin and G. M. Rebeiz, "Inline Capacitive and DC-Contact MEMS Shunt Switches," IEEE Microwave and Wireless Components Lett. 11, pp. 334-336, 2001
7. V. M. Lubecke, B. Barber, E. Chan, D. Lopez, M. E. Gross, and P. Gammel, "Self-Assembling MEMS Variable and Fixed RF Inductors," IEEE Trans. Microwave Theory Tech 49, pp. 2093-2098, 2001
8. Y. Sun, J. L. Tauritz, R. G. F. Baets, "Micromachined RF Passive Components and Their Applications in MMICS," Intl. J. RF and Microwave CAE 9, pp. 310-325, 1999
9. G. W. Dahlmann and E. M. Yeatman, "High Q microwave inductors on silicon by surface tension self-assembly," Elec. Lett. 36, pp. 1707-1708, 2000.
10. Y.-J. Kim and M. G. Allen, "Surface Micromachined Solenoid Inductors for High Frequency Applications," IEEE Trans. Components, Packaging, Manufacturing Technology 26, pp. 26-33, 1998.
11. A. Dec and K. Suyama, "Micromachined electro-mechanically tunable capacitors and their applications to RF IC's," IEEE Trans. Microwave Theory Tech. 46, pp. 2587-2596, 1998.
12. J. J. Yao, S. Park, R. Anderson, and J. DeNatale, "A low power / low voltage electrostatic actuator for RF MEMS applications," Proc. Solid-State Sensor and Actuator Workshop, pp. 246-249, Hilton Head Island, SC, USA, 2000.
13. H. Nieminen, V. Ermolov, K. Nybergh, S. Silanto, T. Ryhanen, "Microelectromechanical capacitors for RF applications,"J. Micromech. Microeng. 12, pp. 177-186, 2002.
14. E. S.Hung, S. D. Senturia, "Extending the travel range of analog-tuned electrostatic actuators," J. Microelectromech. Systems 8, pp. 497-505, 1999.