Variable MEMS capacitors implemented into RF filter systems

IEEE Transactions on Microwave Theory and Techniques

Volumn 51, Issue 1 II, 2003, Pages 315-319

  Borwick III, Robert L ^a   Stupar, Philip A ^a   DeNatale, Jeffrey F ^a   Anderson, Robert ^a   Erlandson, Robert ^b  

^a ROCKWELL SCIENTIFIC COMPANY   (United States)

^b ROCKWELL COLLINS   (United States)

Author keywords

Reliability; RF microelectromechanical systems (MEMS); Tunable capacitors; Tunable filters

Indexed keywords

ACTUATORS; CAPACITANCE; DIGITAL FILTERS; ELECTRONICS PACKAGING; INSERTION LOSSES; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING GLASS; SILICON WAFERS; SINGLE CRYSTALS; TUNING; UHF DEVICES;

MICROELECTROMECHANICAL CAPACITORS; TUNABLE CAPACITORS; TUNABLE FILTERS; TWO POLE FILTERS; ULTRA HIGH FREQUENCY FILTERS;

VARACTORS;

EID: 0037251194     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2002.806519     Document Type: Article

References (5)

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5. R. Borwick, P. Stupar, J. Denatale, R. Anderson, C. Tsai, and K. Garret, "A high Q, large tuning range tunable capacitor for RF applications," in IEEE MEMS Conf. Tech. Dig., 2002, pp. 669-672.