A zipper-action differential micro-mechanical tunable capacitor

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 29-32

  Ionis, G V ^a   Dec, A ^b   Suyama, K ^b  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b Epoch Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTROMECHANICAL DEVICES; MEMS; MICROMACHINING; MICROMECHANICS; SURFACE MICROMACHINING;

ACTUATION PRINCIPLES; CENTER FREQUENCY; DIFFERENTIAL STRUCTURE; MICRO-ELECTRO-MECHANICAL; MICRO-MECHANICAL; POLYSILICON SURFACE-MICROMACHINING; TUNABLE CAPACITORS; WIDE TUNING RANGE;

TUNING;

EID: 84963799969     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992735     Document Type: Conference Paper

References (10)

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