Realization and design considerations of a flip-chip integrated MEMS tunable capacitor

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 108-118

  Harsh, Kevin F ^a   Su, Bingzhi ^a   Zhang, Wenge ^a   Bright, Victor M ^a   Lee, Y C ^a  

^a UCB 450   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLIP CHIP DEVICES; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; VARACTORS;

FLIP CHIP TRANSFER PROCESSES;

MICROACTUATORS;

EID: 0033906907     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00255-1     Document Type: Article

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