Stable multi-step capacitance control with binary voltage operation at +/-3V in integrated piezoelectric RF MEMS tunable capacitors

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2008, Pages 25-28

  Nagano, T ^a   Nishigaki, M ^a   Kawakubo, T ^a   Itaya, K ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Aluminum nitride; Piezoelectric; Q factor; RF MEMS; Tunable capacitor

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; CAPACITORS; DIELECTRIC DEVICES; ELECTRIC EQUIPMENT; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVES; NITRIDES; PIEZOELECTRICITY; THICK FILMS;

ALUMINUM NITRIDE; PIEZOELECTRIC; Q FACTOR; RF MEMS; TUNABLE CAPACITOR;

CAPACITANCE;

EID: 57349172710     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2008.4633094     Document Type: Conference Paper

References (8)

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8. T. Kawakubo et al., accepted to IEDM 2007 Symp.