Surface micromachined GHz tunable capacitor with 14:1 continuous tuning range

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 1008-1011

  Lee, Chuang Yuan ^a   Chen, Shih Jui ^a   Chi, Derrick ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a  

^a University of Southern California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CAPACITANCE; CAPACITORS; COMPOSITE MICROMECHANICS; DIELECTRIC DEVICES; ELECTRIC CURRENTS; ELECTRIC EQUIPMENT; ENERGY STORAGE; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; REACTIVE ION ETCHING; TUNING; ZINC OXIDE;

BRIDGE STRUCTURES; CONTINUOUS TUNING; CONTINUOUS TUNING RANGE; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; MICROMACHINED TUNABLE CAPACITOR; SIMPLY-SUPPORTED BRIDGE; SINGLE CHIPS; TUNABLE CAPACITORS;

BRIDGES;

EID: 50149109648     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443829     Document Type: Conference Paper

References (5)

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