Determination of gas temperature and thermometric species in inductively coupled plasmas by emission and diode laser absorption

Plasma Sources Science and Technology

Volumn 13, Issue 4, 2004, Pages 691-700

  BoL'Shakov, Alexander A ^a,b   Cruden, Brett A ^a   Sharma, Surendra P ^a  

^a NASA AMES RESEARCH CENTER   (United States)

^b ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; CHEMICAL VAPOR DEPOSITION; ION IMPLANTATION; OPTICAL RESOLVING POWER; OPTIMIZATION; PHOTOIONIZATION; PLASMA ETCHING; SEMICONDUCTOR LASERS;

ISOTROPIC STRIPPING; PLASMA GAS TEMPERATURE; PLASMA-BASED PROCESSES; VERTICAL CAVITY SURFACE-EMITTING LASER DIODE (VCSEL);

INDUCTIVELY COUPLED PLASMA;

EID: 9944240345     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/13/4/019     Document Type: Article

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