Ion and gas temperatures of 0.46 MHz inductive plasma discharges

Journal of Applied Physics

Volumn 100, Issue 5, 2006, Pages

  Tuszewski, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS TEMPERATURES; ION HEATING; ION ROTATIONAL TEMPERATURE;

INDUCTIVELY COUPLED PLASMA; LEAST SQUARES APPROXIMATIONS; PRESSURE EFFECTS; TEMPERATURE MEASUREMENT;

ELECTRIC DISCHARGES;

EID: 33748859619     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2337167     Document Type: Article

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