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Volumn 64, Issue 11-12, 2009, Pages 1266-1279

Effects of oxygen addition to argon glow discharges: A hybrid Monte Carlo-fluid modeling investigation

Author keywords

Argon oxygen gas mixture; Computer simulation; Glow discharge; Numerical modeling; Oxygen addition

Indexed keywords

AR ATOM; ARGON GLOW DISCHARGES; ARGON/OXYGEN GAS MIXTURE; DISSOCIATION DEGREE; FLUID MODELING; FLUID MODELS; GAS MOLECULES; HYBRID MODEL; HYBRID MONTE CARLO; METASTABLE LEVELS; MONTE CARLO MODEL; NUMERICAL MODELING; OXYGEN ADDITION; PLASMA SPECIES; SPECIES DENSITY; SPUTTERING RATE;

EID: 71549167865     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2009.10.003     Document Type: Article
Times cited : (64)

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