Determination of the neutral oxygen atom density in a plasma reactor loaded with metal samples

Plasma Sources Science and Technology

Volumn 18, Issue 3, 2009, Pages

  Mozetic, Miran ^a   Cvelbar, Uros ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM DENSITY; CATALYTIC PROBES; COPPER FIBERS; DISSOCIATION FRACTIONS; GLASS TUBES; INDUCTIVELY-COUPLED; INNER DIAMETERS; METAL SAMPLES; METALLIC SAMPLES; OUTPUT POWER; OXYGEN ATOM; PLASMA REACTORS; PYREX TUBE; RADIO FREQUENCY GENERATORS;

OPTOELECTRONIC DEVICES; OXYGEN; PLASMA APPLICATIONS; PLASMAS;

ATOMS;

EID: 68549122838     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/3/034002     Document Type: Article

References (34)

1. Ostrikov K 2005 Rev. Mod. Phys. 77 489
2. Murphy A B 2002 Phys. Rev. Lett. 89 025002
3. Hody V et al 2006 Thin Solid Films 506 211
4. Sunkara M K, Sharma S, Miranda R, Lian G and Dickey E C 2001 Appl. Phys. Lett. 79 1546
5. Keidar M, Raitses Y, Knapp A and Waas A W 2006 Carbon 44 1022
6. Belmonte T, Czerwiec T and Michel H 2001 Surf. Coat. Techol. 142 306
7. Sunkara M K, Sharma S, Chandrasekaran H, Talbott M, Krogman K and Bhimarasetti G 2004 J. Mater. Chem. 14 590
8. Ferreira J A, Tabares F L and Tafalla D 2007 J. Vac. Sci. Technol. A 25 746
9. Rao R, Chandrasekaran H, Gubbala S, Sunkara M K, Daraio C, Jin S and Rao A M 2006 J. Electron. Mater. 35 941
10. Belmonte T, Pintassilgo C D, Czerwiec T, Henrion G, Hody V, Thiebaut J M and Lourierio J 2005 Surf. Coat. Techol. 200 26
11. Ricard A, Jaoul C, Gaboriau F, Gherardi N and Villeger S 2004 Surf. Coat. Technol. 188 287
12. Pierson J P, Czerwiec T, Belmonte T, Michel H and Ricard A 1998 Plasma Sources Sci. Technol. 7 54
13. Bhoj A N and Kushner M J 2008 Plasma Sources Sci. Technol. 17 035025
14. Ren Y P, Ostrikov K and Xu S 2008 Phys. Plasmas 15 023502
15. Curley G A, Maric D, Booth J P, Corr C S, Chabert P and Guillon J 2007 Plasma Sources Sci. Technol. 16 S87
16. Canal C et al 2007 Plasma Process Polym. 4 445
17. Cartry G, Duten X and Rousseau A 2006 Plasma Sources Sci. Technol. 15 479
18. Cartry G, Magne L and Cernogora G 2000 J. Phys. D: Appl. Phys. 33 1303
19. Vujosevic D et al 2007 J. Appl. Phys. 101 103305
20. Canal C et al 2007 Plasma Chem. Plasma Process. 27 404
21. Ferreira J A and Tabares F L 2007 J. Vac. Sci. Technol. A 25 246
22. Gaboriau F, Cartry G, Peigon M C and Cardinaud C 2006 J. Appl. Phys. 39 1830
23. Mozetic M et al 2003 J. Vac. Sci. Technol. A 21 369
24. Ricard A, Jaoul C, Gaboriau F, Gherardi N and Villeger S 2004 Surf. Coat. Technol. 188-189 287
25. Labazan I and Milosevic S 2004 J. Phys. D: Appl. Phys. 37 2975
26. Drenik A, Cvelbar U, Vesel A and Mozetic M 2005 Inform. MIDEM 35 85
27. Denysenko I B, Xu S, Rutkevych P P, Long J D, Azarenkov N A and Ostrikov A 2004 J. Appl. Phys. 95 2713
28. orli I, Petasch W, Kegel B, Schmid H and Liebl G 1996 Inform. MIDEM 26 35
29. orli I and Roak R 2000 J. Vac. Sci. Technol. A 18 338
30. Babi D, Poberaj I and Mozetic M 2001 Rev. Sci. Instrum. 72 4110
31. Mozetic M, Cvelbar U, Vesel A, Ricard A, Babi D and Poberaj I 2005 J. Appl. Phys. 97 103308
32. Krstulovic N et al 2006 J. Phys. D: Appl. Phys. 39 3799
33. Xu S, Ostrikov K N, Li Y, Tsakadze E L and Jones I R 2001 Phys. Plasmas 8 2549
34. Mozetic M and Zalar A 2000 Appl. Surf. Sci. 158 263