Plasma-surface interaction modelling of d.c. reactive magnetron discharges

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 611-617

  Bretagne, J ^a   Gousset, G ^a   Trennepohl Jr , W ^a  

^a UNIVERSITÉ PARIS SUD   (France)

Author keywords

Magnetron discharges; Plasma surface interactions; Reactive plasmas

Indexed keywords

CARRIER CONCENTRATION; CATHODES; IONS; MATHEMATICAL MODELS; PLASMA INTERACTIONS; SURFACE PHENOMENA;

BOLTZMANN EQUATIONS; COLLISIONAL RADIATIVE MODEL; ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); PLASMA SURFACE INTERACTIONS; REACTIVE MAGNETRON DISCHARGES;

MAGNETRON SPUTTERING;

EID: 0031364826     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00293-4     Document Type: Article

References (15)

1. S. Maniv, W.D. Westwood, J. Vac. Sci. Technol. 17 (1980) 743.
2. F. Guimarães, J.B. Almeida, J. Bretagne, Plasma Sources Sci. Technol. 2 (1993) 138.
3. M. Touzeau, W. Trennepohl Jr, D. Pagnon, J. Bretagne, Romanian J. Phys. (in press).
4. J.E. Miranda, M.J. Goekner, J. Goree, T.E. Sheridan, J. Vac. Sci. Technol. A 8 (1990) 1627.
5. T.E. Sheridan, M.J. Goekner, J. Goree, J. Vac. Sci. Technol. A 8 (1990) 1623.
6. F. Guimarães, J.B. Almeida, J. Bretagne, J. Vac. Sci. Technol. A 9 (1991) 133.
7. F. Guimarães, J. Bretagne, Plasma Sources Sci. Technol. 2 (1993) 127.
8. S.M. Rossnagel, H.R. Kaufman, J. Vac. Sci. Technol. A 5 (1987) 2276.
9. J. Bretagne, G. Delouya, J. Godart, V. Puech, J. Phys. D: Appl. Phys. 14 (1981) 1225.
10. J. Bretagne, J. Godart, V. Puech, J. Phys. D: Appl. Phys. 15 (1982) 2205.
11. W. Trennepohl Jr, J. Bretagne, G. Gousset, D. Pagnon, M. Touzeau, Plasma Sources Sci. Technol. 5 (1996) 607.
12. F. Debal, J. Bretagne, A. Ricard, M. Jumet, M. Wautelet, J.P. Dauchot, M. Hecq, Surf. Coat. Technol. (in press).
13. S. Berg, H.O. Blom, T. Larson, C. Nender, J. Vac. Sci. Technol. A 5 (1987) 2276.
14. A. Billard, C. Frantz, Surf. Coat. Technol. 59 (1993) 41.
15. P. Sigmund, Phys. Rev. 184 (1969) 383.