Kinetic model of a low-pressure microwave discharge in O2-N2 including the effects of O- ions on the characteristics for plasma maintenance

Plasma Sources Science and Technology

Volumn 8, Issue 1, 1999, Pages 110-124

  Guerra, V ^a   Loureiro, J ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRIC FIELDS; IONIZATION OF GASES; KINETIC THEORY; MATHEMATICAL MODELS; MICROWAVES; NITROGEN; OXYGEN; PLASMA SIMULATION;

CONTINUITY EQUATION; ELECTRON BOLTZMANN EQUATION; LOW-PRESSURE MICROWAVE DISCHARGES; MOMENTUM TRANSFER EQUATION; PLASMA DISCHARGES; RATE BALANCE EQUATIONS;

PLASMAS;

EID: 0033075482     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/1/014     Document Type: Article

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