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Volumn 53, Issue 3, 1998, Pages 437-462
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Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: A mathematical simulation
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Author keywords
Glow discharge; Grimm source; Modeling; Optical emission spectrometry
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Indexed keywords
ARGON;
CATHODES;
COMPUTATIONAL METHODS;
COPPER;
ELECTRIC CURRENTS;
EMISSION SPECTROSCOPY;
MATHEMATICAL MODELS;
PLASMA COLLISION PROCESSES;
PLASMA DENSITY;
PRESSURE EFFECTS;
SPECTROMETRY;
SPUTTERING;
CATHODE SPUTTERING;
GRIMM GLOW DISCHARGES;
OPTICAL EMISSION SPECTROMETRY;
GLOW DISCHARGES;
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EID: 0032027713
PISSN: 05848547
EISSN: None
Source Type: Journal
DOI: 10.1016/s0584-8547(97)00148-1 Document Type: Article |
Times cited : (47)
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References (48)
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