Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometry

Journal of Analytical Atomic Spectrometry

Volumn 18, Issue 2, 2003, Pages 151-156

  Fernández, Beatriz ^a   Bordel, Nerea ^a   Pereiro, Rosario ^a   Sanz Medel, Alfredo ^a  

^a UNIVERSITY OF OVIEDO   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ARGON; CONDUCTIVE MATERIALS; CURRENT VOLTAGE CHARACTERISTICS; MULTILAYERS; SPECTROMETRY; SPUTTERING; STAINLESS STEEL;

MOLECULAR GASES;

GLOW DISCHARGES;

EID: 0037325331     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b211422d     Document Type: Article

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