Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity

Applied Optics

Volumn 39, Issue 13, 2000, Pages 2189-2197

  Singh, Mandeep ^a   Braat, Joseph J M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; MULTILAYERS; OPTIMIZATION; REFRACTIVE INDEX; ULTRAVIOLET RADIATION;

EXTREME-ULTRAVIOLET (EUV) MIRRORS;

MIRRORS;

EID: 0000220227     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002189     Document Type: Article

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