Ion beam deposited Mo/Si multilayers for EUV Imaging applications in Astrophysics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5250, Issue , 2004, Pages 99-108

  Ravet, M F ^a   Bridou, F ^a   Zhang Song, X ^a,b   Jerome, A ^a   Delmotte, F ^a   Mercier, R ^a   Bougnet, M ^b   Bouyries, P ^b   DelaboudiniEre J P ^b  

^a UNIV PARIS SUD   (France)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

Astrophysics; EUV imager; Multilayers

Indexed keywords

ASTROPHYSICS; DEPOSITION; ELECTROMAGNETIC WAVE REFLECTION; IMAGE SENSORS; ION BEAM ASSISTED DEPOSITION; MOLYBDENUM; MULTILAYERS; OPTICAL BEAM SPLITTERS; SILICON; SPACE TELESCOPES; SPUTTERING; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

EUV IMAGERS; SOLAR CORONA;

IMAGING TECHNIQUES;

EID: 1942438625     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.514597     Document Type: Conference Paper

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