Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials

Applied Optics

Volumn 37, Issue 19, 1998, Pages 4100-4104

  Tarrio, Charles ^a   Watts, Richard N ^a   Lucatorto, Thomas B ^a   Slaughter, Jon M ^b,c   Falco, Charles M ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b University of Arizona   (United States)

^c MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002970203     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.004100     Document Type: Article

References (12)

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